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Full Description
This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab- lish basic guidelines for future research; iv) to compare the properties of microwave dis- charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi- crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop.
In addition, the following Por- tuguese sources made contributions: Instituto Nacional de Investiga‾iio Cientifica, Junta Nacional de Investiga‾iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer- sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste.
Contents
Surface Wave Discharges.- The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectives.- Wave Propagation in Bounded Plasmas.- Microwave Discharges: Structures and Stability.- Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguides.- Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressure.- Strongly Damped Surface Waves in Plasmas.- Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Field.- Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Waves.- Microwave Plasma Sources.- Surface-Wave Plasma Sources.- Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmas.- ECR Plasma Sources.- Distributed ECR: Concept, Performances and Perspectives.- Large Area Planar Microwave Plasmas.- Fabry-Perot-Type-Microwave Resonator.- Diagnostics.- Diagnostics of Microwave Discharges.- Thermal Discharges: Experiments and Diagnostics.- Optical Diagnostics in Radiofrequency Glow and Afterglow.- Optical Diagnostics for High Electron Density Plasmas.- Use of Emissive Probes in HF Plasmas.- Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas.- Modeling.- Kinetic Modeling of Microwave Discharges.- Collision Dominated Electron Kinetics in Low and High Frequency Fields.- Power Deposition in Low Pressure Capacitively Coupled RF Discharges.- Time Dependent Electron Energy Distribution Functions in Molecular Gases.- Excitation Equilibria in Plasmas; A Classification.- Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundaries.- Light Sources.- Applications of Microwave Discharges toHigh-Power Light Sources.- Applications.- Semiconductor Processing Applications of Microwave Plasmas.- Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas.- Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Deposition.- Surface Wave Plasmas in O2-N2 Mixtures as Active Species Sources for Surface Treatments.- Applications of Distributed Electron Cyclotron Resonance (DECR) to Plasma-Surface Interaction.- Applications of Microwave Discharges to Elemental Analysis.- Microwave Methods for the Fabrication of Optical Fibers.- Diamond Films: Procedures and Parameters.- Participants.
