走査電子顕微鏡：画像の物理学（第３版） Scanning Electron Microscopy : Physics of Image Formation and Microanalysis （3rd ed. 511 p. w. 260 figs. 23,5 cm）

走査電子顕微鏡：画像の物理学（第３版）<br>Scanning Electron Microscopy : Physics of Image Formation and Microanalysis （3rd ed. 511 p. w. 260 figs. 23,5 cm）

走査電子顕微鏡：画像の物理学（第３版）
Scanning Electron Microscopy : Physics of Image Formation and Microanalysis （3rd ed. 511 p. w. 260 figs. 23,5 cm）

Reichelt, Rudolf/ Reimer, Ludwig

SPRINGER, BERLIN

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製本 Hardcover:ハードカバー版／ページ数 510 p.／サイズ 260 illus.
言語 ENG
商品コード 9783540853176

基本説明

Provides a description of the physics of electron-probe formation and of electron-specimen interactions.

Full Description

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Introduction.- Electron optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.-