Predictive Simulation of Semiconductor Processing : Status and Challenges (Springer Series in Materials Science Vol.72) （2004. 470 p. w. 281 figs.）

Ed. by Jarek Dabrowski and Eicke R. Weber

SPRINGER, BERLIN（2004発売）

SPRINGER, BERLIN（2004発売）

• 製本 Hardcover:ハードカバー版／ページ数 470 p.
• 商品コード 9783540204817

基本説明

Contents: Transistors and Atoms.- Atomistic Simulations of Processes at Surfaces.- Atomistic Simulations in Materials Processing.- Atomistic Simulation of Decanano MOSFETs.- Modeling and Simulation of Heterojunction Bipolar Transistors.- and more.

Full Description

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Contents

1 Transistors and Atoms.- 2 Atomistic Simulations of Processes at Surfaces.- 3 Atomistic Simulations in Materials Processing.- 4 Atomistic Simulation of Decanano MOSFETs.- 5 Modeling and Simulation of Heterojunction Bipolar Transistors.- 6 Gate Oxide Reliability: Physical and Computational Models.- 7 High-K Dielectrics: The Example of Pr2O3.- 8 Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3.- 9 Interconnects and Propagation of High Frequency Signals.- 10 Modeling of Electromigration in Interconnects.- 11 Predictive Modeling of Transition Metal Gettering: Applications and Materials Science Challenges.