Full Description
This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail.
Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.
Contents
List of Contributors XIII
1 Pulsed Laser Deposition for Complex Oxide Thin Film and Nanostructure 1
Chunrui Ma and Chonglin Chen
1.1 Introduction 1
1.2 Pulsed Laser Deposition System Setup 2
1.3 Advantages and Disadvantages of Pulsed Laser Deposition 3
1.4 TheThermodynamics and Kinetics of Pulsed Laser Deposition 3
1.5 Monitoring of Growth Kinetics 8
1.6 Fundamental Parameters inThin Film Growth 10
1.7 Pulsed Laser Deposition for Complex Oxide Thin Film Growth 13
1.8 Pulsed Laser Deposition for Nanostructure Growth 23
1.9 Variation of Pulsed Laser Deposition 24
1.10 Conclusion 24
References 25
2 Electron Beam Evaporation Deposition 33
Zhongping Wang and Zengming Zhang
2.1 Introduction 33
2.2 Electron Beam Evaporation System 35
2.3 Characterization ofThin Film 45
2.4 Summary 53
Acknowledgments 53
References 53
3 Nanostructures and Thin Films Deposited with Sputtering 59
Weiqing Yang
3.1 Introduction 59
3.2 Nanostructures with Sputtering 60
3.3 Thin Films Deposited with Sputtering 71
3.4 Summary 76
Acknowledgments 77
References 77
4 Nanostructures and Quantum Dots Development with Molecular Beam Epitaxy 81
Wen Huang
4.1 Introduction 81
4.2 Technology of MBE 82
4.3 Nanoheterostructures Fabricated by Molecular Beam Epitaxy 91
4.4 Quantum Dots Development with Molecular Beam Epitaxy 101
4.5 Summary 103
Acknowledgments 104
References 104
5 Carbon Nanomaterials and 2D Layered Materials Development with Chemical Vapor Deposition 105
Taisong Pan
5.1 Introduction 105
5.2 Carbon Nanotube Synthesis by Chemical Vapor Deposition 106
5.3 Graphene Synthesis by Chemical Vapor Deposition 112
5.4 Metal Dichalcogenide Synthesis by Chemical Vapor Deposition 115
5.5 Summary 119
References 120
6 Nanostructures Development with Atomic Layer Deposition 123
Hulin Zhang
6.1 Introduction 123
6.2 Reaction Mechanisms 125
6.3 Nanostructures Based on ALD 131
6.4 Summary 136
Acknowledgments 137
References 138
7 Nanomaterial Development with Liquid-Phase Epitaxy 141
Weiqing Yang
7.1 Introduction 141
7.2 Hydrothermal Method 142
7.3 Nanostructures Fabricated Using LPE 147
7.4 Summary 156
Acknowledgments 156
References 156
8 Nanostructural Thin Film Development with Chemical Solution Deposition 159
Yanda Ji and Yuan Lin
8.1 Introduction 159
8.2 Precursor Solution Preparation 159
8.3 Coating 162
8.4 Thermal Treatment 163
8.5 Control of the Microstructures in Thin Films Prepared by CSD Techniques 164
8.6 Examples of NanostructuralThin Films Prepared by CSD Techniques 167
8.7 Summary 174
References 175
9 Nanomaterial Development Using In Situ Liquid Cell Transmission Electron Microscopy 179
Xin Chen,Wangfan Zhou, Debiao Xie, and Hongliang Cao
9.1 Introduction 179
9.2 The Technological Development of In Situ Liquid Cell TEM 179
9.3 Nanomaterial Development Using In Situ Liquid Cell TEM Technology 185
9.4 Summary and Outlook 191
Acknowledgments 191
References 192
10 Direct-Writing Nanolithography 195
Min Gao
10.1 Introduction 195
10.2 Electron Beam Lithography 195
10.3 Focused Ion Beam Lithography 198
10.4 Gas-Assisted Electron and Ion Beam Lithography 200
10.5 SPM Lithography 201
10.6 Dip-Pen Lithography 205
10.7 Summary 206
Acknowledgments 207
References 207
11 3D Printing of Nanostructures 209
Min Gao
11.1 Introduction 209
11.2 3D Printing Processes 209
11.3 Types of 3D Printing 210
11.4 3D Direct LaserWriting by Multiphoton Polymerization 214
11.5 3D Printing Applications 217
11.6 Summary 219
Acknowledgments 220
References 220
12 Nanostructured Thin Film Solid Oxide Fuel Cells 223
Alex Ignatiev, Rabi Ebrahim, Mukhtar Yeleuov, Daniel Fisher, Xin Chen, NaijuanWu, and Serekbol Tokmoldin
12.1 Introduction 223
12.2 Solid Oxide Fuel Cells 223
12.3 Summary 237
Acknowledgments 237
References 237
13 Nanostructured Magnetic Thin Films and Coatings 239
Goran Rasic
13.1 Introduction 239
13.2 High-Frequency Devices 240
13.3 Magnetic Information Storage Devices 251
13.4 Summary 261
Acknowledgments 261
References 262
14 Phase Change Materials for Memory Application 267
Liangcai Wu and Zhitang Song
14.1 Introduction 267
14.2 Ge2Sb2Te5 and Its Properties' Improvement 268
14.3 High-Speed and Lower-Power TiSbTe Materials 277
14.4 Summary 283
Acknowledgments 283
References 283
15 Nanomaterials and Devices on Flexible Substrates 285
Hulin Zhang
15.1 Introduction 285
15.2 Nanomaterials on Flexible Substrates 286
15.3 Devices on Flexible Substrates 292
15.4 Summary 300
Acknowledgments 301
References 301
Index 305
