Description
How Can We Lower the Power Consumption of Gas Sensors?
There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications.
This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain.
In addition, the book includes:
- An introduction to MEMS for MEMS materials, and a historical background of MEMS
- A concept for cleanroom technology
- The substrate materials used for MEMS
- Two types of deposition techniques, including chemical vapour deposition (CVD)
- The properties and types of photoresists, and the photolithographic processes
- Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining
- The design issues of a microheater for MEMS-based sensors
- The synthesis technique of a nanocrystalline metal oxide layer
- A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor
- Low-cost, low-temperature synthesis techniques
- An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters
MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.
Table of Contents
Introduction
Cleanroom Technology
Microelectromechanical System
Significance of MEMS
References
Substrate for MEMS
Introduction
Silicon: The Base
Dielectrics
References
Deposition
Physical Vapour Deposition
Chemical Vapour Deposition
Metallization
References
Photolithography: Pattern Transfer
Introduction
Photoresist for Structuring
Some Important Properties of Photoresist
Types of Photoresists: Negative and Positive Photoresists
Designing of Mask Layout
Photolithography Process
Application of Photoresist and Prebake
Alignment, Exposure, and Pattern Formation
PR Developer and Postbake
Stripping (Photoresist Removal)
Some Advanced Lithographic Techniques
Structuring MEMS: Micromachining
Introduction
Bulk Micromachining
Surface Micromachining
Etch-Stop Technique
High-Aspect-Ratio Micromachining
References
Microheaters for Gas Sensor
Introduction
Need of Microheater
Types of Microheater
Microheater Design Issues
Heater Material Selection
Heater Geometry Selection
Function of Interdigitated Electrode
Software Used
Heating Power Consumption
Fabrication of Microheater
Microheater Array
References
SENSOR APPLICATIONS
Semiconductors as Gas Sensors
Introduction
Development of Semiconductor Sensors
What Is a Nanosensor?
Solid-State Chemical Sensors
References
Sensing with Graphene
Introduction
Properties of Graphene
Characterization Techniques
Synthesis of Single-Layer Graphene/Few-Layer Graphene
Graphene Oxide
Potential Application
Summary
References
Nanocrystalline ZnO-Based Microfabricated Chemical Sensor
Introduction
Device Structure: Vertical and Horizontal
Comparison of Vertical and Horizontal Structure
Metal–Insulator–Metal Structure
Nanocrystalline ZnO as Sensing Material
Sensing Layer Deposition by Chemical Route
References
Nanostructures for Volatile Organic Compound Detection
Introduction
Volatile Organic Compounds
Different Nanostructures
Sensing Mechanism
Measurement Technique
Effect of Relative Humidity on VOC Detection
References
Sensor Interfaces
Signal Processing
Smart Sensors
Interface Systems
References
MEMS- and Nanotechnology-Enabled Sensor Applications
MEMS and Nanotechnology
Automotive Applications: An Elaborated Study
Home Appliances
Aerospace
Environmental Monitoring
Process Engineering
Medical Diagnostic
References
