Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning : Volume 9

著者名：Kohli, Rajiv/Mittal, Kashmiri L.

William Andrew（2016/11/04発売）

• 言語：ENG
• ISBN：9780323431576
• eISBN：9780323431729

Description

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods.This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales.- Provides a comprehensive coverage of innovations in surface cleaning- Written by established experts in the surface cleaning field, presenting an authoritative resource- Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Table of Contents

Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile NanostructuresChapter 2. Gas-Phase Cleaning for Removal of Surface ContaminantsChapter 3. Laser-Induced Spray Jet CleaningChapter 4. Brush Scrubbing for Post-CMP CleaningChapter 5. Contamination Removal From UV and EUV PhotomasksChapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics