Semiconductor-On-Insulator Materials for Nanoelectronics Applications (Engineering Materials)

Nazarov, A. (EDT)/ Colinge, J. (EDT)/ Balestra, F. (EDT)

Springer（2011/01発売）

• 製本 Hardcover:ハードカバー版／ページ数 400 p.／サイズ 118 illus., 18 in color
• 商品コード 9783642158674

基本説明

Is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.

Full Description

"Semiconductor-On-Insulator Materials for NanoElectronics Applications" is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications" is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.

Contents

New semiconductor-on-insulator materials.- Physics of modern SemOI devices.- Diagnostics of the SOI devices.- Sensors and MEMS on SOI.