Fast Simulations of Electro-Thermal MEMS : Efficient Dynamic Compact Models (Microtechnology and MEMS) （2006. XII, 180 p. w. 108 ill. (8 col.) 23,5 cm）

Bechtold, Tamara/ Rudnyi, Evgenii B./ Korvink, Jan G.

SPRINGER, BERLIN（2006発売）

• 製本 Hardcover:ハードカバー版／ページ数 200 p.／サイズ 95 illus.
• 言語 ENG
• 商品コード 9783540346128

基本説明

Provides the knowledge required to design electro-thermal MEMS on a simulation basis.

Full Description

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

Contents

Dynamic Electro-thermal Simulation of Microsystems.- Overview of Linear Model Order Reduction.- Selected Model Reduction Software.- Application of Model Reduction to Electro-thermal MEMS.- Advanced Development.- References.