Fast Simulations of Electro-Thermal MEMS : Efficient Dynamic Compact Models (Microtechnology and MEMS) （2006. XII, 180 p. w. 108 ill. (8 col.) 23,5 cm）

Bechtold, Tamara/ Rudnyi, Evgenii B./ Korvink, Jan G.

SPRINGER, BERLIN（2006発売）

• 製本 Hardcover:ハードカバー版／ページ数 200 p.／サイズ 95 illus.
• 言語 ENG
• 商品コード 9783540346128

基本説明

Provides the knowledge required to design electro-thermal MEMS on a simulation basis.

Full Description

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices.