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基本説明
Now available in softcover, this practical book offers topical content from AMN, the only book series on microsystems technology, for engineers as well as MSc and PhD students on MEMS courses.
Full Description
This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'.
Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.
The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass.
The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
Contents
PREFACE
PROCESS ENGINEERING METHODS AND MICROSYSTEM TECHNOLOGY
MOMENTUM AND HEAT TRANSFER IN MICROSIZED DEVICES
TRANSPORT PROCESSES AND EXCHANGE EQUIPMENT
MULTIPHASE FLOW, EVAPORATION, AND CONDENSATION AT THE MICROSCALE
GENERATION AND MULTIPHASE FLOW OF EMULSIONS IN MICROCHANNELS
CHEMICAL REACTIONS IN CONTINUOUS-FLOW MICROSTRUCTURED REACTORS
DESIGN PROCESS AND PROJECT MANAGEMENT
SIMULATION AND ANALYTICAL MODELING FOR MICROREACTOR DESIGN
INTEGRATION OF SENSORS AND PROCESS-ANALYTICAL TECHNIQUES
MICROFABRICATION IN METALS AND POLYMERS
SILICON MICROFABRICATION FOR MICROFLUIDICS
MICROFABRICATION IN CERAMICS AND GLASS
INDUSTRIAL APPLICATIONS OF MICROCHANNEL PROCESS TECHNOLOGY IN THE UNITED STATES
INDUSTRIAL APPLICATIONS IN EUROPE
INDUSTRIAL PRODUCTION PLANTS IN JAPAN AND FUTURE DEVELOPMENTS
LABORATORY APPLICATIONS OF MICROSTRUCTURED DEVICES IN STUDENT EDUCATION
SUBJECT INDEX
