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基本説明
This softcover edition covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.
Full Description
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.
The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
Contents
PREFACE
FABRICATION TECHNOLOGY
MATERIAL CHARACTERIZATION
MONOLITHICALLY INTEGRATED INERTIAL SENSORS
CMOS?MEMS ACOUSTIC DEVICES
RF CMOS MEMS
CMOS-BASED PRESSURE SENSORS
CMOS-BASED CHEMICAL SENSORS
BIOMETRIC CAPACITIVE CMOS FINGERPRINT SENSOR SYSTEMS
CMOS-BASED BIOCHEMICAL SENSING SYSTEMS
CMOS-BASED THERMAL SENSORS
CIRCUIT AND SYSTEM INTEGRATION
SUBJECT INDEX
