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基本説明
Now available in sofcover, this book closely examines the enabling technologies for the fabrication of micro- and nanodevices.
Full Description
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
Contents
M3: the Third Dimension of Silicon Trends in MEMS Commercialization Capacitive Interfaces for MEMS Packaging of Advanced Micro- and Nanosystems High-frequency Integrated Microelectromechanical Resonators and Filters MEMS in Mass Storage Systems Scanning Micro- and Nanoprobes for Electrochemical Imaging Nanofluidic Modeling and Simulation Nanofluidics - Structures and Devices Carbon Nanotubes and Sensors CMOS-based DNA Sensor Arrays
