基本説明
Includes sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes, and existing and new applications. Provides practical information on preparing individual functional a-Si:H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si:H TFT operations and unique material characteristics.
Full Description
This is a reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si:H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si:H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si:H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries. This is a practical reference for engineers/scientists working in the TFT field, a textbook for graduate students/high-tech engineers who desire a comprehensive introduction to the field.
