ＭＥＭＳ設計 Micro Electro Mechanical System Design (Mechanical Engineering)

ＭＥＭＳ設計<br>Micro Electro Mechanical System Design (Mechanical Engineering)

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ＭＥＭＳ設計
Micro Electro Mechanical System Design (Mechanical Engineering)

Allen, James J./ J. Alle, James

ウェブストア価格 ¥60,430（本体¥54,937）
CRC Press Inc（2005/07発売）
外貨定価 US$ 290.00
ポイント 549pt

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製本 Hardcover:ハードカバー版／ページ数 496 p.
言語 ENG
商品コード 9780824758240
DDC分類 621.381

基本説明

This structured text provides a unified treatment of all Micro Electro Mechanicsl System (MEMS) design procedures. The author focuses on the complete process reguired for designing and developing MEMS.

Full Description

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:

Understanding the fabrication technologies that are available

Recognizing the relevant physics involved for micron scale devices

Considering implementation issues applicable to computer aided design

Focusing on the engineering details and the subsequent evaluation testing

Maintaining an eye for detail regarding both reliability and packaging

These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.

Introduction. Fabrication Processes. MEMS Technologies. Scaling Issues for MEMS. Design Realization Tools for MEMS. Electro-Mechanics. Modeling and Design.
MEMS Sensors and Actuators. Packaging. Reliability. Appendix.