Ion Implantation Technology : 16th International Conference on Ion Implantation Technology; IIT 2006 (Aip Conference Proceedings) / Kirkby, Karen J. (EDT)/ Gwilliam, Russell M. (EDT)/ Smith, Andy (EDT)

Ion Implantation Technology : 16th International Conference on Ion Implantation Technology; IIT 2006 (Aip Conference Proceedings) （2006）

Kirkby, Karen J. (EDT)/ Gwilliam, Russell M. (EDT)/ Smith, Andy (EDT)

American Institute of Physics（2006/12発売）

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製本 CD-ROM:CD-ROM版／ページ数 664 p.
言語 ENG
商品コード 9780735403666

Full Description

This is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter.