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Full Description
An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Contents
1. Introduction S. Lucyszyn; 2. Electromechanical modelling of electrostatic actuators D. Elata and V. Leus; 3. Switches and their fabrication technologies T. Lisec; 4. Niche switch technologies S. Lucyszyn, S. Pranonsatit, J. Y. Choi and A. Holmes; 5. Reliability I. De Wolf; 6. Dielectric charging G. Papaioannou; 7. Stress and thermal characterisation R. Y. Fillit and R. Fortunier; 8. High power handling F. Coccetti and R. Plana; 9. Packaging H. Tilmans, A. Jourdain and P. De Moor; 10. Impedance tuners and tuneable filters A. Pothier and T. Vähä-Heikkilä; 11. Phase shifters and tunable delay lines L. Dussopt; 12. Reconfigurable architectures T. Vähä-Heikkilä; 13. Industry roadmap for RF MEMS J. Bouchaud, R. Sorrentino, B. Knoblich, H. Tilmans and F. Coccetti.



