薄膜折出ハンドブック（第５版） Handbook of Thin Film Deposition : Theory, Technology and Semiconductor Applications （5TH）

Schepis, Dominic (EDT)/ Seshan, Krishna (EDT)

Elsevier - Health Sciences Division（2024/10発売）

• 製本 Paperback:紙装版/ペーパーバック版／ページ数 538 p.
• 言語 ENG
• 商品コード 9780443135231
• DDC分類 621.38152

Full Description

Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, ferroelectric films, LED research, and materials for memory applications, and other thin film applications.

Of particular note in this new edition is the coverage of "reduction to practice," a phase where the idea for a technology transitions from a concept to actual implementation. This section includes chapters that review the most relevant methods to fabricate thin films toward practical applications. This book also discusses the latest applications of various thin film deposition technologies.

Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is suitable for students, materials scientists, engineers, and managers working in academia or semiconductor-related R&D.

Contents

1. Introduction

Part I Reduction to Practice
2. Process Integration for On-Chip Interconnects
3. Sputter Processing
4. Epitaxial Thin Film Growth
5. CVD Processing and Processes
6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization
7. Limits of Gate Dielectric Scaling

Part II Applications and Limitations
8. Reliability Considerations for Thin Film Devices
9. Thin Film Development for LED Technologies
10. Emerging Ferroelectric Thin Films: Applications and Processing
11. Applications of Thin Film in Semiconductor Memories
12. Yield Issues and Defect Density in Thin Films