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Full Description
This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems.
Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration.
Showcases the integration of MEMS and optical/photonic devices into real commercial products.
Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems.
Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore.
Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Contents
Section I Optical MEMS for communication, imaging, and sensing applications
1 Optical MEMS: An introduction
Guangya Zhou and Chengkuo Lee
2 MEMS optical scanners for laser projection display
Hiroshi Toshiyoshi
3 Optical micro-electrical-mechanical phased array
Youmin Wang and Ming-Chiang Wu
4 Optical MEMS for space: Design, characterization, and applications
Frederic Zamkotsian
5 MEMS vibratory grating scanners and their applications
Guangya Zhou
6 F-P filters and applications in spectrometers and gas sensing
Chong Pei Ho and Chengkuo Lee
7 Electrothermally actuated MEMS mirrors: Design, modeling, and applications
Huikai Xie, Xiaoyang Zhang, Liang Zhou, and Sagnik Pal
8 MEMS tunable optics: Liquid and solid methods
Yongchao Zou and Guangya Zhou
Section II Nanophotonics for communication, imaging, and sensing applications
9 Physical sensors based on photonic crystals
Bo Li and Chengkuo Lee
10 Silicon photonic variable waveguide coupler devices
Kazuhiro Hane
11 Metasurface and ultrathin optical devices
Xianzhong Chen, Dandan Wen, and Fuyong Yue
12 Optical micro- and nanoresonators for biochemical sensing
Xingwang Zhang, Liying Liu, Lei Xu, Xudong Fan, and Guangya Zhou
13 Terahertz MEMS metamaterials
Prakash Pitchappa and Chengkuo Lee
Section III Biomicro- and nanophotonics and optofluidics for health care applications
14 Optofluidic devices and their applications
Sung-Yong Park
15 Implantable CMOS microphotonic devices
Jun Ohta and Takashi Tokuda
16 Microfluidic photocatalysis
Ning Wang and Xuming Zhang
