Silicon VLSI Technology （2ND）

Silicon VLSI Technology （2ND）

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  • 製本 Hardcover:ハードカバー版／ページ数 817 p.
  • 言語 ENG
  • 商品コード 9780136141563
  • DDC分類 621

Full Description


 

For one-quarter/semester, senior/graduate level courses in Fabrication Processes.

Unique in approach, this text provides an integrated view of silicon technology? with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

Contents

(NOTEBasic Concepts, Manufacturing Methods and Equipment, Measurement Methods, Models and Simulation, Limits and Future Trends in Technologies and Models, Summary of Key Ideas, References, and Problems.)

1. Introduction and Historical Perspective.

Introduction. Integrated Circuits and the Planar Process? Key Inventions That Made It All Possible. Semiconductors. Semiconductor Devices. Semiconductor Circuit Families. Modern Scientific Discovery? Experiments, Theory and Computer Simulation. The Plan for This Book.



2. Modern CMOS Technology.

CMOS Process Flow.



3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers.


4. Semiconductor Manufacturing? Clean Rooms, Wafer Cleaning and Gettering.


5. Lithography.


6. Thermal Oxidation and the Si/SiO2 Interface.


7. Dopant Diffusion.


8. Ion Implantation.


9. Thin Film Deposition.


10. Etching.


11. Backend Technology.