Confocal Scanning Optical Microscopy and Related Imaging Systems

Kino, Gordon S./ Corle, Timothy R.

Academic Press（1996/08発売）

• 製本 Hardcover:ハードカバー版／ページ数 335 p.
• 言語 ENG
• 商品コード 9780124087507
• DDC分類 502.82

基本説明

Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations.

Full Description

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given.The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes.

Contents

InstrumentsDepth and Transverse ResolutionPhase ImagingApplicationsAppendix A: Vector Field Theory for Depth and Transverse Resolution of a CSOM