Micro Process Engineering : Fundamentals, Devices, Fabrication, and Applications (1st ed. 2013. XXII, 507 p. w. 255 b&w figs., 1 col. fig. and 33 tables)
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Micro Process Engineering : Fundamentals, Devices, Fabrication, and Applications (1st ed. 2013. XXII, 507 p. w. 255 b&w figs., 1 col. fig. and 33 tables)  Paperback

Herausgegeben von Kockmann, Norbert/ Brand, Oliver/ Fedder, Gary K./ Hierold, Christofer/ Korvink, Jan G.

  • WILEY-VCH(2013発売)
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