Description
Engineering of Point Defects in Solids: A Thermodynamic Approach to the Physics of Semiconductors covers the theoretical and experimental thermodynamics and kinetics of defect formations in solids, including the formation of complex defects from simple ones. The book describes point defects (vacancies, antistructural, interstitial atoms, and impurities) while also providing algorithms for calculating their defect concentrations, conductivity, and stoichiometric composition. Doping of a substance with impurities, with a focus on germanium and silicon (as common semiconductors), is covered, including retrograde solubility, polytrophy, the solubility of impurities, and the mutual influence of donor and acceptor impurities. The thermodynamics of complex defects formed with the participation of vacancies (divacancies and complexes) are discussed, as is luminescence as a non-destructive method for monitoring the dynamics of changes in the concentration of defects in certain technological processes, with particular attention paid to the phenomenon of electron-photon interaction. Other topics covered include the optical properties of various complexes, compounds with volatile components, analyzing the kinetics of precipitate and nanocrystal formation, and more.- Studies the thermodynamics and kinetics of point defect formation in solids and provides methods for calculating and controlling them, particularly in semiconductors and nano- and microelectronics- Provides algorithms and experimental data for calculating defect concentrations, identifying defect parameters and their influence on the properties of solids- Discusses crystal growth, chemical vapor disposition, atomic layer disposition, magnetron sputtering, and other electronics considerations
Table of Contents
1. A Crystalline Solid in a State of Equilibrium2. The Equilibrium Defects Concentration Calculations by a Gibb's Free Energy Minimization Method3. Algorithms for Calculating the Solubility of Impurities in Silicon and Germanium4. Thermodynamics, Vacancies, Divacancies, and their Complexes in Silicon5. Thermodynamics of Defect Formation in A3B5 Compounds6. Optical and Photoelectrical Properties of the Gallium Arsenide Complexes7. Thermodynamics of Compounds with One Volatile Component and a Wide Homogeneity Region8. Kinetics of Formation and Decay of Complexes in Solids9. Kinetics of Formation of Nanocrystals, Clusters, and Precipitates of Atoms and Molecules in Solids10. Oxygen Precipitates in Silicon Modeling and Experimental Studies11. Solubility of Impurities in Nanoparticles12. Control of Oxygen Vacancy Concentration in Oxides by Annealing in an Oxygen Atmosphere
