Description
Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry. When pursuing patents, there is a phase called 'reduction to practice' where the idea for a technology transitions from a concept to actual use. The section 'Thin Film Reduction to Practice' includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed. Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D. - Offers a practical survey of thin film technologies including design, fabrication, and reliability- Covers core processes and applications in the semiconductor industry and discusses latest advances in new thin film development- Features new chapters that review methods on front-end and back-end thin films
Table of Contents
1. IntroductionPart I Reduction to Practice2. Process Integration for On-Chip Interconnects3. Sputter Processing4. Epitaxial Thin Film Growth5. CVD Processing and Processes6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization7. Limits of Gate Dielectric ScalingPart II Applications and Limitations8. Reliability Considerations for Thin Film Devices9. Thin Film Development for LED Technologies10. Emerging Ferroelectric Thin Films: Applications and Processing11. Applications of Thin Film in Semiconductor Memories12. Yield Issues and Defect Density in Thin Films
