Description
Gallium Oxide: Technology, Devices and Applications discusses the wide bandgap semiconductor and its promising applications in power electronics, solar blind UV detectors, and in extreme environment electronics. It also covers the fundamental science of gallium oxide, providing an in-depth look at the most relevant properties of this materials system. High quality bulk Ga2O3 is now commercially available from several sources and n-type epi structures are also coming onto the market. As researchers are focused on creating new complex structures, the book addresses the latest processing and synthesis methods.Chapters are designed to give readers a complete picture of the Ga2O3 field and the area of devices based on Ga2O3, from their theoretical simulation, to fabrication and application.- Provides an overview of the advantages of the gallium oxide materials system, the advances in in bulk and epitaxial crystal growth, device design and processing- Reviews the most relevant applications, including photodetectors, FETs, FINFETs, MOSFETs, sensors, catalytic applications, and more- Addresses materials properties, including structural, mechanical, electrical, optical, surface and contact
Table of Contents
1. Introduction and OverviewPart 1: Technology of Ga2O32. Bulk Growth of Ga2O3 by Edge-Fed Ribbon method3. Progress in MOCVD growth of Ga2O34. CVD of different Ga2O3polymorphs and their applications5. Pulsed laser deposition of aluminum gallium oxides for deep-UV detector applications6. Dry Etching of Ga2O3 7. Ga2O3 -based nanostructures8. Doping of Ga2O3Part 2: Properties9. Structural, electrophysical and optical properties of Ga2O3 10. First-principles modeling of sesquioxide semiconductors11. Schottky Contacts to Ga2O312. Ohmic contacts to Ga2O313. Surface Properties of Ga2O314. Deep Traps in Ga2O315. Radiation Damage in Ga2O3Part 3: Applications16. Novel Solar-Blind Photodetectors and FETs Using Ga2O3 Exfoliated Flakes17. FINFETs and Power MOSFETs18. Power Ga2O3 Rectifiers19. UV detectors20. Ga2O3-based gas sensors21. Photocatalysis (photocatalytic conversion CO2, etc.) 22. Transparent conductive oxides (amorphous Ga2O3 films)
