Description
Vacuum technology has enormous impact on human life in many aspects and fields, such as metallurgy, material development and production, food and electronic industry, microelectronics, device fabrication, physics, materials science, space science, engineering, chemistry, technology of low temperature, pharmaceutical industry, and biology. All decorative coatings used in jewelries and various daily products窶琶ncluding shiny decorative papers, the surface finish of watches, and light fixtures窶蚤re made using vacuum technological processes. Vacuum analytical techniques and vacuum technologies are pillars of the technological processes, material synthesis, deposition, and material analyses窶蚤ll of which are used in the development of novel materials, increasing the value of industrial products, controlling the technological processes, and ensuring the high product quality. Based on physical models and calculated examples, the book provides a deeper look inside the vacuum physics and technology.
Table of Contents
Part 1: Physics of Low pressures. Fundamental Quantities in Vacuum Physics. Molecular Kinetic Theory and its Implications. Thermodynamics of Gases at Low Pressures. Real Gases. Transfer Phenomena in Gases at Vacuum Conditions. Molecular Collisions. Gas Flow at Vacuum Conditions. Sorption. Pumping Vacuum Systems. Part 2: Vacuum Production. Categorization of Vacuum Pumps. Mechanical Displacement Pumps. Dry Displacement pumps. Mechanical Kinetic Pumps. Kinetic Propellant Pumps and Accessories. Capture Pumps. Part 3: Low Pressure Measurements. Introduction into the Methodology of Low Pressure Measurements. Force Gauges with Manometric Fluids. Force Gauges with Elastic Deformation Elements. Force Gauges with Solid Sensing Elements. Viscosity Molecular Gauges. Vacuum Thermal Gauges. Ionization Gauges with Hot Filaments. Electric Discharge Vacuum Gauges. Vacuum Gauges with Radioactive Emitters. Partial Pressure Measurement at Vacuum Conditions. Energy Analyzers of Electrically Charged Particles. Gas Flow Measurements and Controls. Leak Detection. Appendix. Index. List of Tables.
