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Full Description
The 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on "Next Generation Micro/Nano Systems".
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/Nano Fluidics.
Contents
Preface and Committees
Chapter 1: Physical, Chemical and Optical MEMS
History and Recent Progress of MEMS Physical Sensors
Continuous Process for Large-Area Flexible MEMS
Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes
Micromachined Devices for Use in Terahertz Applications
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method
Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview
Foreign Bodies - The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems
Chapter 2: Radiofrequency MEMS
Integrated Microsystems
RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems
Functional RF Devices Powered by MEMS Technologies
Chapter 3: Micro(Nano) Fluidics
Microfluidic Microchemomechanical Systems
Hydrogel-Based Microfluidic Systems
Super-Hydrophilic PDMS and PET Surfaces for Microfluidic Devices
New Viscosity Data for CuO-Water Nanofluid - The Hysteresis Phenomenon Revisited
