Micro and Nano Fabrication : Tools and Processes

Gatzen, Hans H./ Saile, Volker/ Leuthold, Jürg

Springer-Verlag Berlin and Heidelberg GmbH & Co. K（2016/10発売）

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製本 Paperback:紙装版/ペーパーバック版／ページ数 519 p.
言語 ENG
商品コード 9783662508268

Full Description

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.