Nano-tribology and Materials in MEMS （2013）

Sinha, Sujeet K. (EDT)/ Satyanarayana, N. (EDT)/ Lim, Seh Chun (EDT)

Springer-Verlag Berlin and Heidelberg GmbH & Co. K（2013/09発売）

• 製本 Hardcover:ハードカバー版／ページ数 275 p.
• 言語 ENG
• 商品コード 9783642369346
• DDC分類 621.89

Full Description

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

Contents

Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS.- Nanofriction by Reciprocating Sliding.- The structure and tribological behaviors of nanostructure thin films.- Detection of lateral forces and formation of atomic chains.- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects.- Microfabricated sleds for friction studies.- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications.- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems.- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS.- Lubrication of High Sliding MEMS.- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant.- Probing the complexities of Friction in submicron contacts between two pristine surfaces.- Atomistic Simulation of Polymer Nanotribology.- Simulation of frictional behavior of polymer-on-polymer sliding.- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.