Nanoimprint Lithography : An Enabling Process for Nanofabrication

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Nanoimprint Lithography : An Enabling Process for Nanofabrication

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  • 製本 Hardcover:ハードカバー版/ページ数 288 p./サイズ 212 illus.
  • 商品コード 9783642344275

基本説明

Provides consistent multi-disciplinary approach demonstrating principles of the field including latest achievements in hot areas such as nanofabrication and nanotechnology.

Full Description

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.

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