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Full Description
A unique publication which delivers both fundamental and practical information on plasma science with respect to the discipline's advancements in the last decades, based on a simplified chemical view. The book introduces plasma properties and plasma reactors, and then in-depth the interactions between plasma species and material surfaces. The reader is introduced to the mechanisms of etching and deposition, processes and roles of active species, as well as industrial applications including nanostructured polymers, nanotubes, biomedical applications and plasma medicine.
Contents
Preamble -1- Plasma chemistry, -2- Basic principles -3- Architectures of plasma reactors -4- The plasma mechanisms -5- Recent developments
