Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science)

Claeys, Cor/ Simoen, Eddy

Springer International Publishing AG（2018/08発売）

• 製本 Hardcover:ハードカバー版／ページ数 438 p.
• 言語 ENG
• 商品コード 9783319939247

Full Description

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

Contents

Preface.- Introduction.- Basic Properties of Metals in Semiconductors.- Sources of Metals in Si and Ge Processing.- Characterization and Detection of Metals in Silicon and Germanium.- Electrical Activity of Metals in Si and Ge.- Impact of Metals on Silicon Devices and Circuits.- Gettering and Passivation of Metals in Silicon and Germanium.- Modeling and Simulation of Metals in Silicon and Germanium.- Conclusions.