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Full Description
Collection of selected, peer reviewed papers from the 15th Annual conference and 4th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2013), November 3-6, 2013, Tianjin, China.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The 260 papers are grouped as follows:
Chapter 1: Micro/Nano Materials, Technologies and Application,
Chapter 2: Micro/Nanofluids Research and Technologies,
Chapter 3: Micro/Nano Research, Design and Fabrication,
Chapter 4: Measurements, Sensors and MEMS,
Chapter 5: Micro Actuators and Devices,
Chapter 6: Optical Research,
Chapter 7: Energy and Power Research and Technologies,
Chapter 8: Bioresearch and Bioinformatics,
Chapter 9: MEMS/Nano Applied Research
Contents
Preface
Chapter 1: Micro/Nano Materials, Technologies and Application
Microstructure and Millimeter-Wave Attenuation Performance of Exfoliated Graphite with Different Expanding Volume
Influence on Friction Material Performance of Nano-MMT Composites of PF by In Situ Method
Effects of Different Preparation Parameters on the Properties of MAO Coatings
Characterization of Ag-TiO2 Electronic Structures and Nanotubes Based on First-Principles Calculation
Improved Study on the Performance of Polyacrylamide/Attapulgite Clay Composite Material Removing Copper (II) Ions from Aqueous Solution
The Experiment Research of Gas-Assisted Ion Etching Nanograting
Design and Fabrication of a Micro Spring with Steel Structures for the Microtensile Testing of Thin Films
Comparative Photocatalytic Properties of Cu2O from Octahedron to Sphere Structures
Research on Air-Media Mixed Substrate Technology of GaAs Based Millimeter Wave Antenna
A Novel Nanoparticles Activation Technique for Electroless Plating on ABS Plastic
Effect of Electrolytic Temperature on Nano-Hydroapatite Deposition on ASD Bioceramic Films
Preparation and Microstructure of Layered Hydroxyapatite Nanorods on Bioceramic Coatings Using Plasma Electrolytic Oxidation Technique
Preparation and Characterization of Nanofibriled Cellulose via High Frequency Ultrasonication from Cornstalk
ZnO/Graphene Composites: Synthesis, Characterization and Optical Properties
The Study of SiC Thin Films Produced by Magnetron Sputtering
Surface Modification of Nano-Titanium and its Effect on the Antibacterial Property of Waterborne Wood Coating
Design and Deposition of Infrared Antireflection Protection Film on Magnesium Fluoride Substrate for 3‾5 μm
Design and Fabrication of Mult-Wave Band Yellow Laser Filter Film
Design and Evaluation of a High-Accuracy Measurement System for Sheet Resistance of Thin Films
Optical and Electrical Properties of P-Type N-Doped ZnO Film
Performance of Wood Flooring UV Coatings Interfacial Modified by Nano-Silica
Effect of RuO2 on Piezoresistive Properties of CB/MVQ Composite Materials
Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces
The Componential and Morphological Characteristics of Cu3N Induced by Femtosecond Laser Pulses
Visible Light Photocatalytic Degradation of Methylene Blue over N-Doped TiO2
Study on the Influence of N-Doping to the In Situ Growth TiO2 Film Photocatalytic Character
Evaluation of Annealing Effects on TiO2 Nanorod Arrays for Dye-Sensitized Solar Cells by Equivalent Circuit Analysis
Graphene Synthesis on Specified Location
Experimental Investigations of the Detonation Synthesis of Micron Al2O3 by the Precursor of Thermal Decomposition
Study on Preparation and Resistive Switching Characteristics of SnO2 Films
"Double Junction" of Ag-Doping TiO2 Nanotubes
Synthesis and Characterization of Highly Dispersed and Homogeneous Nano Zinc Oxide Rods
Effect of Milling Time on Properties of Ti-48at%Al Composite Powder Prepared by High Energy Milling
Directly Writing Nanodots on Silicon Surface by Combined-Dynamic Dip-Pen Nanolithography
The Effective Thermal Conductivity of Porous Polymethacrylimide Foams
Design and Fabrication of BaTiO3 Crystal Thin-Film Waveguides
Experimental Investigation of Microstructure and Piezoresistive Properties of Phosphorus-Doped Hydrogenated Nanocrystalline Silicon Thin Films Prepared by PECVD
Research on Graphene Preparation by Liquid Phase Ultrasonic Exfoliation and Antifriction Performance in Water
Tribological Properties of Nano-MMT/In Lubricant Additive on 45#Steel Tribo-Pair
Effects of Electrolyte Composition on the Properties of Micro-Arc Oxidation Coatings Formed on 6063 Alloy
Effect of Size of Graphite Flakes on the Physical Properties of the Graphite Materials
Research on the Preparation of Antimony Nanoparticles by Mechanical Ball Milling
Preparation and Photocatalytic Properties of Rod-Shaped TiO2 Based on Salix Fiber
Deposition and Characterization of Mg Doped CuCrO2 Films by DC Magnetron Sputtering
Fabrication and Phase-Transition Characteristic Investigation of Nanocrystalline VO2 Thin Film
Controllable Self-Assembly of 9,10-Diphenylanthracene into Micro-Nanostructures from 0-Dimension to 3-Dimension by Simple Post-Drying Thermal Annealing Method
Study on the Improvement of Microprism Retroreflective Material
Research on the Sol-Gel Method of Preparing Ternary Nano SiO2-Al2O3-TiO2 Materials
Synthesis of Nanosized NaY Molecular Sieve under Dynamic Hydrothermal Crystallization
Preparation of Nano Silicon Dioxide with Sol-Gel Method
Fabrication of Bi2Te3 Nanowires Applied in Thermoelectric Generators
Study on the Photocatalytic Degradation of Diesel Pollutants in Seawater by a Prepared Nano Ag-Droped Zinc Oxide
Photocatalytic Degradation of Diesel Pollutants in Seawater by Using Nano Li-Doped Zinc Oxide under Visible Light
Study of Birefringence and Mode Field for Hollow-Core Photonic Bandgap Fiber
Photoelectric Properties of Metallic Mesh Based on Flexographic Printing
Comparable Studies on Photocatalytic Activities of Ag3PO4 Microspheres and Polyhedrons
Switchable Wettability of Silicon Micro-Nano Structures Surface Produced by Femtosecond Laser
Synthesis and Luminescent Properties of Eu3+ Doped Lu2O3 Powders Using Micro-Emulsion
Equivalent Mechanical Properties of Graphene Predicted by an Improved Molecular Structural Mechanics Model
Nanomechanical Properties and Surface Wettability of Carbon Films Prepared by Magnetron Sputtering
A Study of Abrasive Rotating Velocity Effect on Monocrystalline Silicon in Ultra-Precision Mechanical Polishing via Molecular Dynamic Simulation
Preparation of Alumina Nanowires by Etched Method in Acid Solution
Preparation of TiO2 (Au) Nanotubes by Hydrothermal Method for Photocatalytic Reduction of Cd2+ Ions
Research on Multi-Walled Carbon Nanotubes by Fiber Laser Irradiation
Theoretical and Experimental Research of CO2 Absorption Enhancement by Carbon Nano-Tube
Effect of Balls/Powder Weight Ratio in Milling on Microstructure and Properties of MWCNTs/Cu Composites
Molecular Dynamics Simulation of ZnO Nanowire Manipulation
Vertically Aligned Carbon Nanotubes Transfer with Glass Frit
Electromagnetic Induction Heating Bonding between Carbon Nanotubes and Metal Electrode
Change the Magnetic Properties of Electroplated Core Films to Improve Micro-Fluxgate Performance
Preparation of PLA and PLGA Magnetic Microspheres with T-Shaped Microchannel Reactor
Cell Immobilization and Detection Using Surface Plasmon Resonance Biochemical Analysis System Based on Nano SiO2 Film
Preparation and Antibacterial Bioactivity of Ti-Base Titania Nanotube Arrays
Study on Preparation of Chitosan Microspheres Loaded with Levofloxacin
Fenton Degradation of Methylene Blue by CuFeS2 Ultrafine Powders
Study and Fabrication of Filter Film in Tactical Optical Fiber Communication System
Embedded Seal Cavity Fabricated in HTCC MEMS Technology
Self-Assembly of a Superhydrophobic ZnO Nanorod Arrays Film on Wood Surface Using a Hydrothermal Method
Preparation and Application of Macropore Nanometer Host-Guest Catalyst
Large-Area Self-Assembled Monolayer of Silica Microspheres by Convective Assembly
Assessment on the Collection Efficiency of an Aerosol Sampler in Micro and Nanoparticles Environment
Glass Frit as a Hermetic Joining Material for Bonding among Three Wafers with Metallic Film Feed-Through
Numerical Simulation of Microstructure Evolution in AZ31 Magnesium Alloy during Equal Channel Angular Pressing
Fracture Behavior of Cu/Cu-WCP Layered Composites
Experimental Research on Influence of Temperature and Compression on Wrinkle Evolution of Thin Films on Compliant Substrates
Investigation on Dissolving Process of Secondary Phases and Austenitic Grain Growth in a Microalloyed Steel
Evolution in Dislocation Configuration of Deformed Fe-40Ni-Ti Alloy during Isothermal Relaxation
Viscous Dissipation of Polymer Melt in Micro Channels and Macro Channels
Influence of Sonomechanical Treatment on the Structure of Cellulose Micro/Nano Fibrils
Experimental Investigation and Numerical Simulation of Pure Copper Foil Springback in Micro-Bending Process
Smoothness Control of Wet Etched Si{100} Surfaces in TMAH+Triton
Fabrication, Characterization and Photocatalytic Activity of TiO2/Cellulose Composite Aerogel
The Fabrication of High Resistance-Temperature-Coefficient Vanadium Oxide Film by Magnetron Sputtering Method
Research on the Characterization of Ultra-Smooth K9 Glass Surface Polished by Nanoparticle Colloid Jet Machining
The Research of Gypsum Investment Mould Used as Forming Micro-Castings
Fabrication and Characterization of Transparent ZnO Film Based Resistive Switching Devices
Size Distributions of Mesophase Microbeads Obtained from Heterogeneous and Homogeneous Systems
Fabrication of Filter Film Using in Polarized Light Guide Prism System
Chapter 2: Micro/Nanofluids Research and Technologies
Experimental Study on Dispersion Stability of Rutile TiO2 Nano-Particles Suspension of Ammonia-Water Solution
Multilayer Microfluidic Electrokinetic Device with Vertical Embedded Electrodes
Research of Removable Electrodes Based on Microfluidic Chip
Effect of Joule Heat on Hydrophily of Microchannel
Nucleation and Growth Characteristics of Bubble in Subcooled Flow Boiling in Microchannel
Effects of Wall Slip on Filling Flow for Polymer Melt in Micro Injection Molding
Research of Magnetic Fluid under the Orthogonal Stationary Magnetic Field
Numerical Simulation of Jetting Instability in Flow Focusing Microfluidics
Improving the Current Stability through the Bubbles-Free Microfluidic Electro-Spray Ionizing Chip
A Microfluidic-Based Trapping and Positioning Method for Single Cells
The Tunable Optofluidics Waveguide Design Based on the Novel Dual Side-Coupled Cavities Plasmonic Structure
Organic Solvent Fumigation Bonding for Multi-Layer Poly(methyl Methacrylate) Microfluidic Device
Swirl-Based Non-Contact Method of Cell Orientation Control
Preparation and Thermosensitivity of N-Isopropylacrylamide Microgels Containing L-Phenylalanine
A Test Droplets Dispensing Solution for Digital Microfluidic Biochip Parallel Testing
Numerical Analysis of the Liquid Crystalline Backflow-Driven Effect under a Continuous Square Wave Electric Field
Numerical Simulation of the LCP Hele-Shaw Flow Based on the Injection Molding Process
Chapter 3: Micro/Nano Research, Design and Fabrication
Design and Fabrication of Universal Inertial Switch Based on MEMS Technology
Design of Microwave Reconfigurable Equalizer Based on MEMS Technology
Research about Flexible PDMS Micro-Perforated Panel Based on MEMS Silicon Mold
Research of Micro-Inertial Device High-Aspect-Ratio Etching Parameters
A New Method to Analyze the Stiffness of MEMS Accelerometer
Noncircular Tool Fabrication by WEDG Using Electrode Jump Motion and Noncircular Array Holes Drilling
Architectural Design and Simulation of a Fourth-Order Sigma-Delta Modulator
Research on Fabrication and Electronic Characteristics of Dual-Extended Nano Structure Memristor
Interaction Effects of Micronozzle Geometric Parameters on Propulsion Performance
Study on Fabrication Process of SU8 Photoresist Microstructures and Evaluation of Stress Gradient
Ultra-Precision Machining of Off-Axis Convex Ellipsoidal Surface Using Two Different Accurate Spiral Tool Paths
Graphitization Wear of Diamond Tool in Nanometric Cutting of Single Crystal Silicon
Fabrication of the Silicon-Based Three-Dimension Neural Probe Arrays
Two Benches PDMS Free Flow Electrophoresis Chip
Polarization-Insensitive Holey Fiber with Ultra-Small Mode Areas Using a Cross-Slot-Structure Core
The Enhanced Raman Scattering from Ag Nanoball/ZnO Hollow Nanosphere Arrays Fabricated by Laser-Induced Annealing
Method to Design and Fabricate a Novel RF MEMS Switch
Thermoelectric Device Based on Vertical Silicon Nanowires for On-Chip Integration
The Fabrication of Trans-Scale Micro-Fuze Safety Device
Design of Intelligent Meteorological System Based on MEMS
Ultrasonic Modulating Compound Discharge - Electrochemical Micro-Fine Machining Technology and its Applications
Study on Parameters of MEMS Planar Zigzag Slot for Fuze
Cantilever Piezoelectric Micro-Pump Modeling Based on Bond Graph Port
Study on Shock Resistance of MEMS Devices with Different Stoppers
Corner Effect of Micro-Comb Capacitive Structure
The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design
Fabrication and Formation Mechanism of Electrospun Spatially Defined Fibrous Patterning Structures on Conductive and Insulating Substrates
Effect of Strain Rate on the Simulation of MEMS Safety and Arming Device
Design and Analysis of a Novel Locking Mechanism of MEMS Safety and Arming Device
Chapter 4: Measurements, Sensors and MEMS
Compact Compound Imaging System with Large Target Surface
Sustained-Release Performance In Vitro of BCG/Fe3O4/Chitosan Thermosensitive Gel Integrated Material for Irrigation Therapy of the Bladder Tumor
The Influence and Control of Encapsulation Moisture in MEMS Gyroscope
A Micromachined Glucose Monitoring Sensor with Diffusion Control
A Solid-Core Photonic Crystal Fiber Nanosensor
Miniature Stress Test of Miniature Components Based on Piezoresistive Stress Sensors Test Circuit
Performance Test for Nanometer Accuracy Capacitance Displacement Sensor
Design of the Digital in Signal Processing Platform of the Gyroscope Based on FPGA
Study on Measurement Method of Dynamic Linearity for High G Micro Accelerometer
The Structure Design and Simulation of the Ring Resonator Based on SOI Planar Optical Waveguide for the Micro Biochemical Sensor
A MEMS-Based Electrostatic Field Sensor Using Out-of-Plane Thermal Actuation
Experiment Research on Array Grouped by MEMS Vector Hydrophone
Study of a Temperature Detection Sensor in Road Surface Sensors System
Design of Road Condition Sensor Based on Multiple Frequency Detecting Technology
Design of Charge Pump for Inertial Sensor Drive Circuit
Control System of an Electromagnetic Vibrating Ring Gyroscope
A New Readout System for LC Resonant Sensors
A High-Resolution Lowpass Sigma-Delta Modulator Applied in Micro-Gyroscope
Study on MEMS Capacitive Differential Pressure Sensor
A Novel Passive Wireless Humidity Sensor Based on a Dual-Metal Inductor
Mixed Mode Driving Circuit of Quartz Gyroscope Interface Circuit
Research on the Phase Difference Extraction Algorithm of the Free-Drive Three-Axis MEME Gyroscope Used in Spinning Projectiles
The Impact of Typical Aerosol Types on Polarization Sensitive Spectral for Bionic Micro-Nano Polarization Sensor
A Wireless Power-Free Pressure Sensor for Real-TimeIn VivoGastrointestinal Pressure Monitoring
A Readout System Design for LTCC-Based Piezoresistive Accelerometer
Design and Experiment of Ultrasonic Anemometer Using TDC-GP2 Time-to-Digital Converter
AFM Fast Tip Approach Based on Fiber Optic Sensor
The Delta-Sigma Modulator of Fractional-N Frequency Synthesizer for Wireless Sensors Network Applications
Research for the Resonator Structure Process Technology of Resonant Pressure Sensors
Design of Water Pressure Sensor Applied to the Eye Aqueous Humor Detection
The Design and Simulation of Vibratory Ring Gyroscope
A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
Design of Guided Shell Inclination Measurement and Display System Based-on MEMS Accelerometer
Research on Zero Bias Characteristic of MEMS Accelerometer in FBW
The Design and Simulation of Wide Range Pressure Sensor Based on HTCC for High-Temperature Applications
Silicon Thermal Flow Sensor Based on Ceramic Substrate
Fabrication and Characteristics of the 2D Magnetic Sensor Based on the MOSFET Hall Device
The Design of Gm-C Low-Pass Filter for Micromachined Gyroscope
A 16 Bits Sigma-Delta Modulator Applied in Gyroscope
Characteristics Research of Hall Magnetic Sensor Based on Nano-Polysilicon Thin Film Transistors
Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Cantilever Beam
The Design and Experiment of a Two-Dimensional Position Sensitive Detecting (PSD) Sensor Based on Avalanche Breakdown
Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Nano-Polysilicon TFTs
Design and Optimization of Sigma-Delta Accelerometer
Design, Fabrication and Test of In-Plane MEMS Piezoresistive High-g Accelerometer
The Design of Lead Compensator for ΣΔ Micromachined Accelerometer
High Precision Double-Interferometry for Large Step-Height On-Line Measurement Using Waveform Transforming Technology
Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators
A Novel Noise Reduction Algorithm of MEMS Gyroscope Based on Compressive Sensing and Lifting Wavelet Transform
Micro-Machined Gyroscope Mathematical Model and Error Analysis
Finite Element Analysis on Thermosonic Ball Bonding Process of MEMS Chip
Lateral Resolution Test for Confocal Laser Scanning Microscope
Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror
Tightness Detecting Technique for the Valves of Diaphragm Gas Meter Based on Chromatic Confocal Method
Design of Third-Order Single-Loop Full Feed-Forward Sigma Delta Modulator
Quartz Crystal Double-Ended Tuning Fork Resonator for High Resolution Force Sensing
Rapid Temperature Measurement of Meteorological Detection System Based on MEMS
Three-Dimensional Measurement System Based on Micro Stereovision
Micron and Nanometer Measuring Methods Based on Metrological Scanning Electron Microscope
Control for Multi-DOF Micro-Order Planar Motion Stage Based on Sliding Mode Observer
Analysis of Influencing on the Ground Calibration for PIG Based on Seasons
Error Compensation Technology of Semi-Strapdown MEMS Inertial Measurement System
The Triaxial Angular Rate Measurement System Based on Two MEMS Accelerometers Used for Rotating Carrier
Research on MEMS Based Real-Time Measurement System for the Nuclear Fuel Transport Cask
Chapter 5: Micro Actuators and Devices
Compact Polarization Beam Splitter Based on Surface Plasmon Polariton Silicon Waveguide
The Design and Realization of Micro Induction Heater for the Thermal Bubble Generation
Automated and Optimal Actuation Voltage Waveform Design for Contact Bouncing Mitigation of MEMS Switches
The Research of Industrial Brake Temperature Measurement Based on Nano-Materials and Nano-Technology
Hysteresis Compensation of MSMA Actuators Based on Neural Network Model
A High-Order Sigma-Delta Modulator Applied in Micro-Accelerometer
Sliding-Mode Control for Piezoelectric Actuators Based on Hysteresis Observer
An Electromechanical Tunable Grating on Silicon-on-Insulator Platform
Sliding Mode Control for Electromagnetic Actuation MOEMS Scanning Mirror
One-Time Use MEMS Metal Bridge Igniter Based Electro-Explosive Solid Off-On Switch
Optimization of Element Parameters for a New OPFC Ultrasonic Phased Array Transducer
Focusing Actuating Performance of OPFC Phased Array Transducer Based on DPSM
Chapter 6: Optical Research
Novel Integrated Demultiplexer with the Bragg Grating Structure Based on Surface Plasmon Polaritons
Research of Optical Characteristics of Diffuser with Taper Microstructure by Micro Injection Molding
Study on Measuring System of Automatic Image Alignment Refractive Index Based on New Mathematical Model
The Precision Observation of Projection Model for Microgripper System Based on Stereo Light Microscope
Research of the PZT Polarization for Deformable Mirror
Chapter 7: Energy and Power Research and Technologies
Acoustic Noise Energy Scavenger with Noise Reduction Effect
The Influence of Electrodes Position to Alternating Current Annular Micromixer
Design and Research of Dynamical Property Testing System for Nano and Micron Inertial Components
Kinematic Analysis of Ultrasonic Vibration Assisted Micro End Grinding
Artifacts in KPFM in FM, AM and Heterodyne AM Modes
Research on Natural Frequency of MEMS Structure with Meander Suspensions by Mechanical Character Analysis
Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology
Effects of Structure and Air Damping on Quality Factor under Various Pressure Environments Based on Experimental Research
Effects of Droplets' Collision on Heat and Mass Transfer between High-Temperature Gas and Micron Water Droplets
Observation of Ferromagnetic Resonance in Magnetic Exchange Force Microscopy (MExFM)
Investigation on Multi-Piezoelectric Effects from the First Positive Piezoelectric Effect
The Failure of the Novel Solid MEMS Switch in Multi-Physical Coupling Field
Study on Small PV Intelligent Power Supply System
Research of Street Lighting System Based on Piezoelectric Energy Generator
Power Handling Capability Improvement of Metal-Contact RF MEMS Switches by Optimized Array Configuration Design of Contact Dimples
Voltage Reversal of Microbial Fuel Cells Stacked in Serial
Research of a New Type Rectifier and Voltage-Multiplier Piezoelectric Energy Harvester Circuit
Chapter 8: Bioresearch and Bioinformatics
Effect of Wrinkled Microstructure on Surface Wettability of Ginkgo Leaves
Precise Measurement and Feature Information Extraction of the Key Drag-Reducing Structures of Sharks
Histogram Based Bacteria Colony Features Analysis
Effects of Nano-Devices on Growth, Quality and Activities of Enzymes in Nitrogen Metabolism of Hydroponic Lettuce
Design and Simulation of a Parylene-Based Three-Dimensional Cuff Electrode for Peripheral Nerve Stimulation
A Transdermal Miniature Syringe Design Based on Port Ontology for Drug Delivery
Chapter 9: MEMS/Nano Applied Research
Calibration of Weights and Weight Sets Based on Micro-Mass Standard Measurement System
Experiment and Simulation of Hard Cutting System Dynamic Characteristics
A Nonlinear Approach for Dynamic Responses of a Nano-Beam Based on a Strain Gradient Nonlocal Theory
Effect of Micro-EDM on Diameter Consistency of Micro-Hole Arrays
Reliability Factors Analysis of MEMS Safety and Arming System
Simulation of Nanoimprint Based on PSQ-L Polymer
RF Performances of MEMS Suspended Inductor under High Overload Environments
Research on the SINS Algorithm Based on Spiral Vector
Research on Catalyst Penetration Process of Patternless Casting Manufacturing Technique
Experimental Research on WEDM Machining for Metal Components with Micro/Meso-Scale
Heat Transfer Characteristic of Flat Trapezoid Grooved Micro Heat Pipes
A New Head Tracking Method
Nanotechnologies for Potential Environmental Applications in Groundwater and Soil
