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Full Description
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
Contents
What are the silicides.- Structure.- Fabrication.- Testing Deformation.- Dislocations in silicides.- Time Dependent Deformation - Creep in Silicides.- Fatigue in Silicides.- Fracture in Silicides.- Deformation in Nano Silicides.- The Effect of B.- Silicide Composites.- Alloying in Silicides.- Grain Size Effect on Mechanical Properties.
