Semiconductor Characterization : Present Status and Future Needs

Bulis, W.Murray/ etc.

American Institute of Physics（1996/01発売）

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製本 Hardcover:ハードカバー版／ページ数 744 p.
言語 ENG
商品コード 9781563965036
DDC分類 537.622

基本説明

Includes sections devoted to characterizaion for silicon IC development and manufacturing and for III-V compound seciconductor materials, devices, and manufacturing.

Full Description

This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing. This book acts as a reference or sourcebook for industry, government and academia who are interested in the reviews and state-of-the-art knowledge presented on semiconductor issues pertaining to the subject of semiconductor characterization for semiconductor research, development, and manufacturing.

Contents: 1. Drivers for Silicon Process Development and Manufacturing. 2. Metrology Requirements for Beyond 0.35-um Geometries 3. Silicon Wafers, Gate Dielectrics, and Process Simulation. 4. Interconnects and Failure Analysis. 5. Critical Analytical Methods. 6. In-Situ, Real Time Diagnosis, Analysis, and Control. 7. Frontiers in Compound Semiconductors.