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Contents
1 Introduction to Silicon Photonics
1.1 Introduction
1.2 VLSI: Past, Present, and Future Roadmap
1.3 The Interconnect Problem in VLSI
1.4 The Long-Haul Optical Communication Link
1.5 Data Network
1.6 Conclusions
1.7 Scope of the Book
2 Basic Properties of Silicon
2.1 Introduction
2.2 Band Structure
2.3 Density-of-States Function
2.4 Impurities
2.5 Alloys of Silicon and Other Group IV Elements
2.6 Heterojunctions and Band Lineup
2.7 Si-Based Heterostructures
2.8 Direct GAP: Ge/SiGeSn Heterojunctions
3 Quantum Structures
3.1 Introduction
3.2 Quantum Wells
3.3 Quantum Wires and Dots
3.4 Superlattices
3.5 Si-Based Quantum Structures
3.6 Effect of Electric Field
4 Optical Processes
4.1 Introduction
4.2 Optical Constants
4.3 Basic Concepts
4.4 Absorption Processes in Semiconductors
4.5 Fundamental Absorption in Direct GAP
4.6 Fundamental Absorption in Indirect GAP
4.7 Absorption and Gain
4.8 Intervalence Band Absorption
4.9 Free-carrier Absorption
4.10 Recombination and Luminescence
4.11 Nonradiative Recombination
4.12 Excitonic and Impurity Absorption
5 Optical Processes in Quantum Structures
5.1 Introduction
5.2 Optical Processes in QWs
5.3 Intersubband Transitions
5.4 Excitonic Processes in QWs
5.5 Effect of Electric Fields
5.6 Optical Processes in QWRs
5.7 Optical Processes in QDS
6 Light Emitters in Si
6.1 Introduction
6.2 Basic Theory of Light Emission
6.3 Early Efforts: Zone Folding
6.4 Band Structure Engineering Using Alloys
6.5 Quantum Confinement
6.6 Impurities in Silicon
6.7 Stimulated Emission: Prospect
6.8 Intersubband Emission
6.9 Tensile-Strained Ge Layers
7 Si Light Modulators
7.1 Introduction
7.2 Physical Effects
7.3 Electrorefraction in Silicon
7.4 Thermo-Optic Effects in Si
7.5 Modulators: Some Useful Characteristics
7.6 Modulation Bandwidth under Injection
7.7 Optical Structures
7.8 Electrical Structures
7.9 High-Bandwidth Modulators
7.10 Performance of EO Modulators
8 Silicon Photodetectors
8.1 Introduction
8.2 Optical Detection
8.3 Important Characteristics of Photodetectors
8.4 Examples of Types of Photodetectors
8.5 Examples of Photodiodes in Standard Silicon Technology
8.6 Phototransistors in Standard Silicon Technology
8.7 CMOS and BiCMOS
8.8 Silicon-on-Insulator (SOI)
8.9 Photodetectors Using Heteroepitaxy
9 Raman Lasers
9.1 Introduction
9.2 Raman Scattering: Basic Concepts
9.3 Simplified Theory of Raman Scattering
9.4 Raman Effect in Silicon
9.5 Raman Gain Coefficient
9.6 Continuous-Wave Raman Laser
9.7 Further Developments
10 Guided Lightwaves: Introduction
10.1 Introduction
10.2 Ray Optic Theory for Light Guidance
10.3 Reflection Coefficients
10.4 Modes of a Planar Waveguide
10.5 Wave Theory of Light Guides
10.6 3D Optical Waveguides
10.7 Loss Mechanisms in Waveguides
10.8 Coupling to Optical Devices
10.9 Tapers
11 Principle of Planar Waveguide Devices
11.1 Introduction
11.2 Model for Mode Coupling
11.3 Directional Coupler
11.4 Distributed Bragg Reflector
11.5 Some Useful Planar Devices
12 Waveguides for Dense Wavelength-Division Multiplexing (DWDM) Systems
12.1 Introduction
12.2 Structure and Operation of AWGs
12.3 AWG Characteristics
12.4 Methods for Improving Performance
12.5 Applications of AWGs
12.6 PHASAR-Based Devices on Different Materials
12.7 Echelle Grating
13 Nonlinear Silicon Photonics
13.1 Introduction
13.2 Nonlinear Optical Effects in Silicon
13.3 Third-Order Nonlinearities
13.4 Two-Photon Absorption
13.5 Free-Carrier Effects
13.6 Nonlinear Waveguides
13.7 Nonlinear Resonators
13.8 Applications in Signal Processing
13.9 Future Directions
14 Fabrication Techniques and Materials Systems
14.1 Introduction
14.2 Planar Processing
14.3 Substrate Growth and Preparation
14.4 Material Modification
14.5 Etching
14.6 Lithography
14.7 Fabrication of Waveguides
14.8 Grating Formation Process
14.9 Materials Systems for Waveguide Formation
