半導体製造技術入門（第２版） Introduction to Semiconductor Manufacturing Technology （2ND）

Xiao, Hong

Society of Photo Optical（2012/10発売）

• 製本 Hardcover:ハードカバー版／ページ数 664 p.
• 言語 ENG
• 商品コード 9780819490926
• DDC分類 621.38152

基本説明

The second edition covers advancements made in the past decade and adds new illustrations.

Full Description

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.