Ion Implantation Technology (Aip Conference Proceedings / Materials Physics and Applications)

Seebauer, Edmund G. (EDT)/ Felch, Susan B. (EDT)/ Jain, Amitabh (EDT)

American Institute of Physics（2009/03発売）

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製本 CD-ROM:CD-ROM版／ページ数 576 p.
言語 ENG
商品コード 9780735406346
DDC分類 621.38152

Full Description

The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).