Ion Implantation Technology : 17th International Conference on Ion Implantation Technology, IIT 2008, Monterey, California, 8-13 June 2008 (Aip Conference Proceedings / Materials Physics and Applications) / Seebauer, Edmund G. (EDT)/ Felch, Susan B. (EDT)/ Jain, Amitabh (EDT)

Ion Implantation Technology : 17th International Conference on Ion Implantation Technology, IIT 2008, Monterey, California, 8-13 June 2008 (Aip Conference Proceedings / Materials Physics and Applications) （2008）

Ion Implantation Technology : 17th International Conference on Ion Implantation Technology, IIT 2008, Monterey, California, 8-13 June 2008 (Aip Conference Proceedings / Materials Physics and Applications) （2008）

Seebauer, Edmund G. (EDT)/ Felch, Susan B. (EDT)/ Jain, Amitabh (EDT)

American Institute of Physics（2008/12発売）

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製本 Hardcover:ハードカバー版／ページ数 576 p.
言語 ENG
商品コード 9780735405974
DDC分類 621.38152

Full Description

The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).