Frontiers of Characterization and Metrology for Nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology (Aip Conference Proceedings / Materials Physics and Applications) / Seiler, David G. (EDT)/ Diebold, Alain C. (EDT)/ McDonald, Robert (EDT)

Frontiers of Characterization and Metrology for Nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology (Aip Conference Proceedings / Materials Physics and Applications) （2007）

Frontiers of Characterization and Metrology for Nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology (Aip Conference Proceedings / Materials Physics and Applications) （2007）

Seiler, David G. (EDT)/ Diebold, Alain C. (EDT)/ McDonald, Robert (EDT)

American Institute of Physics（2007/09発売）

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ページ数 592 p.
言語 ENG
商品コード 9780735404410
DDC分類 621.3815

Full Description

This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.