Ion Impantation Technology : 16th International Conference on Ion Implantation Technology; IIT 2006 (Aip Conference Proceedings: Accelerators, Beams, and Instrumentations)

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Ion Impantation Technology : 16th International Conference on Ion Implantation Technology; IIT 2006 (Aip Conference Proceedings: Accelerators, Beams, and Instrumentations)

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  • 製本 Hardcover:ハードカバー版/ページ数 682 p.
  • 言語 ENG
  • 商品コード 9780735403659
  • DDC分類 621.38152

Full Description

This is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter.

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