Micro-Manufacturing : Design and Manufacturing of Micro-Products

Koc, Muammer (EDT)/ Ozel, Tugrul (EDT)

John Wiley & Sons Inc（2011/05発売）

• 製本 Hardcover:ハードカバー版／ページ数 388 p.
• 言語 ENG
• 商品コード 9780470556443
• DDC分類 670

Full Description

This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place.  It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies.  After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.

Contents

Foreword vii

Contributors ix

1 Fundamentals of Micro-Manufacturing 1

2 Micro-Fabrication Processes in Semiconductor Industry 25

3 Modeling and Analysis at Micro-Scales 43

4 Metrology, Inspection, and Process Control in Micro-Scales 71

5 Micro-Layered Manufacturing 97

6 Micro-Laser Processing 159

7 Polymer Micro-Molding/Forming Processes 197

8 Mechanical Micro-Machining 235

9 Micro-Forming 275

10 Micro-Electro Discharge Machining (μEDM) 301

11 Metal Injection Molding at Micro-Scales (μMIM) 347

Index 371