Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2 : Creating and Measuring Vacuum (Vacuum and Thin-film Deposition Technologies)

Gaines, J.R./ Healy, Matthew

Elsevier - Health Sciences Division（2025/12発売）

• 製本 Hardcover:ハードカバー版／ページ数 400 p.
• 言語 ENG
• 商品コード 9780443336041
• DDC分類 621.55

Full Description

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2: Creating and Measuring Vacuum reviews the many specialized components that must be effectively integrated to create, support, and measure vacuum. This includes pipes, valves, flexible bellows, and several types of vacuum pumps, including rotary vane, dry scroll, turbomolecular, and cryogenic varieties. Pressure sensors are also reviewed with specific attention to their operating principles, pressure range, accuracy, reproducibility, and calibration. The unique features of various vacuum components are highlighted to aid in the selection of devices appropriate for specific pressure ranges and operating conditions. This volume informs the reader about critical vacuum components and how they can be integrated in a complete, dynamically pumped, vacuum system. The specific nuances related to pressure ranges and vacuum component characteristics are featured. Design considerations, such as vacuum gauge placement relative to active gas flows, pressure differentials, and pressure control approaches are also discussed.

Contents

1. Pipes, Flanges and Fittings for Vacuum Systems
2. Bellows, Feedthroughs, Viewports and Adapters
3. Valves, Manipulation and Motion in Vacuum
4. Vacuum Pumps, Terms, Types, History, and Cost of Ownership
5. Vacuum Pumps for Rough Vacuum
6. Gas Transfer Pumps for High and Ultrahigh Vacuum
7. Gas Capture Pumps for High and Ultrahigh Vacuum and the Future of Pumps
8. Measuring Pressure in Vacuum
9. Common Vacuum Gauges
10. Sensor Location, Pressure Control, and Sensors for Extreme Conditions in Vacuum Systems