MEMS材料・加工ハンドブック MEMS Materials and Processes Handbook (MEMS Reference Shelf)

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MEMS材料・加工ハンドブック<br>MEMS Materials and Processes Handbook (MEMS Reference Shelf)

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MEMS材料・加工ハンドブック
MEMS Materials and Processes Handbook (MEMS Reference Shelf)

Herausgegeben von Ghodssi, Reza/ Lin, Pinyen

Springer（2011/07発売）

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製本 Hardcover:ハードカバー版／ページ数 1188 p.／サイズ 200 illus.
言語 ENG
商品コード 9780387473161

基本説明

A comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes".

Full Description

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.