MEMS/NEMS Handbook : (1) Handbook Techniques and Applications Design Methods (2) Fabrication Techniques (3) Manufacturing Methods (4) Sensors and Actuators (5) Medical Applications and MOEMS / Leondes, Cornelius T. (EDT)

ＭＥＭＳ／ＮＥＭＳハンドブック（全５巻）<br>MEMS/NEMS Handbook : (1) Handbook Techniques and Applications Design Methods (2) Fabrication Techniques (3) Manufacturing Methods (4) Sensors and Actuators (5) Medical Applications and MOEMS （1st ed. 2006. Corr. 2nd printing）

ポイントキャンペーン

ＭＥＭＳ／ＮＥＭＳハンドブック（全５巻）
MEMS/NEMS Handbook : (1) Handbook Techniques and Applications Design Methods (2) Fabrication Techniques (3) Manufacturing Methods (4) Sensors and Actuators (5) Medical Applications and MOEMS （1st ed. 2006. Corr. 2nd printing）

Leondes, Cornelius T. (EDT)

Springer（2006/06発売）

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製本 Hardcover:ハードカバー版／ページ数 2,088 p.／サイズ 550 illus.
商品コード 9780387245201

基本説明

設計法、組立て技術、生産方法、センサーとアクチュエーター、ＭＯＥＭＳといったＭＥＭＳ／ＮＥＭＳに関する主要トピックスを網羅したレファレンス。
The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Full Description

As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.