MEMS/NEMS Handbook : (1) Handbook Techniques and Applications Design Methods (2) Fabrication Techniques (3) Manufacturing Methods (4) Sensors and Actuators (5) Medical Applications and MOEMS / Leondes, Cornelius T. (EDT)

ＭＥＭＳ／ＮＥＭＳハンドブック（全５巻）<br>MEMS/NEMS Handbook : (1) Handbook Techniques and Applications Design Methods (2) Fabrication Techniques (3) Manufacturing Methods (4) Sensors and Actuators (5) Medical Applications and MOEMS （1st ed. 2006. Corr. 2nd printing）

ＭＥＭＳ／ＮＥＭＳハンドブック（全５巻）
MEMS/NEMS Handbook : (1) Handbook Techniques and Applications Design Methods (2) Fabrication Techniques (3) Manufacturing Methods (4) Sensors and Actuators (5) Medical Applications and MOEMS （1st ed. 2006. Corr. 2nd printing）

Leondes, Cornelius T. (EDT)

Springer（2006/06発売）

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製本 Hardcover:ハードカバー版／ページ数 2,088 p.／サイズ 550 illus.
商品コード 9780387245201

基本説明

設計法、組立て技術、生産方法、センサーとアクチュエーター、ＭＯＥＭＳといったＭＥＭＳ／ＮＥＭＳに関する主要トピックスを網羅したレファレンス。
The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Full Description

More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.