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Full Description
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods.
This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales.
Contents
Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures
Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants
Chapter 3. Laser-Induced Spray Jet Cleaning
Chapter 4. Brush Scrubbing for Post-CMP Cleaning
Chapter 5. Contamination Removal From UV and EUV Photomasks
Chapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics
