Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology (Micro and Nano Technologies)

Bhattacharyya, Bijoy

William Andrew Publishing（2015/04発売）

• 製本 Hardcover:ハードカバー版／ページ数 296 p.
• 言語 ENG
• 商品コード 9780323327374
• DDC分類 620.5

Full Description

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.

Contents

1. Introduction2. Electrochemical Machining: Macro to Micro3. Principle of Material Removal in EMM4. Types of EMM5. Electrochemical Micromachining (EMM) Setup6. Design and Development of Micro Tools7. Influencing Factors of EMM8. Improvement of Machining Accuracy9. Advantages, Applications and Limitations of EMM 10. Micro-Features Fabrication for MEMS and Other Microengineering Applications11. Electrochemical Micro System Technology (EMST)12. Recent Advancements in EMM for Nanofabrication13. Nano-Features on Metals and Semiconductors for Nanotechnology Applications