Description
Advancements in photopolymers have led to groundbreaking achievements in the electronics, print, optical engineering, and medical fields. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, printing plates, 3-D printing, microelectromechanical systems (MEMS), and medical materials. Processes such as photopolymerization, photodegradation, and photocrosslinking, as well as lithography technology in which photofabrications are performed by images of photopolymers, have given rise to very large-scale integrated (VLSI) circuits, microproducts, and more.
Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, Photopolymers: Photoresist Materials, Processes, and Applications covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world’s largest corporations. Offering a state-of-the-art review of progress in the development of photopolymers, this book provides valuable insight into current and future opportunities for photopolymer use.
Table of Contents
Introduction
About the Author
Basic Idea of Photopolymerization
Introduction
Radical Polymerization
Monomers for Photopolymerization
Initiators of Photopolymerization
Inhibition of Polymerization
Cationic Photopolymerization
Photocrosslinking
Scission of Polymers
References
Chemically Amplified Resists
Introduction
Chemical Amplification of Photopolymers
Polymers for Chemical Amplification
Photoacid Generator
References
Process of Chemically Amplified Resists
Introduction
Progress of Resolution Limit
Immersion Lithography
Double Patterning
EUV Lithography
Direct Self-Assembly (DSA)
References
Nanoimprinting
Introduction
Thermal Nanoimprinting
UV Nanoimprinting
Cationic Polymerization of UV Nanoimprinting
Ene-Thiol Polymerization of UV Nanoimprinting
Soft Lithography
References
Industrial Applications of Photopolymers
Introduction
Application to Electronics
Optical Adhesive Polymers
Holographic Photopolymers
Application to Medical Materials
Microelectromechanical Systems (MEMS)
References
