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Full Description
This conference is the premier world meeting for the presentation of the latest advances in all aspects of ion implantation, from the fundamentals of ion-solid interactions to manufacturing applications of the new machines and systems. It also offers detailed consideration of the state of the art for advanced thermal material science to advanced equipment, with emphasis on junction formation and also other novel applications.
Contents
Doping Technology.- Annealing Technology.- Characterization.- Modeling and Simulation.- Advanced Equipment.
