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基本説明
This handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps.
Full Description
Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.
Contents
Introduction I. Technologies Innovative exposure techniques for 3-D microfabrication Large Surface Area Techniques PTFE photo-fabrication by SR (TIEGA process) Photomask Technologies Photomask Comparisons Galvanics and Molding Simulating New LIGA Processes Commercial Simulation Program Simulation Tools for Design Design for Assembly and Safe Manufacturing II. Applications Market Analysis and Commercialization of LIGA Optical MEMS and Polymer Optics Micromechanics RF Applications Evolution of the Spectrometer Microfluidics in Biotechnology MEMS (actuators) Microfluidics for Biochip Applications Ultrasonic Transducers Swiss Luxury Watches Using MEMS Components III. Outlook Extreme Nanostructuring Novel Resist Systems Hard Gold Interferential X-ray Lithography Table-top Synchrotrons for Future Light Sources and their Application in Microfabrication
