Discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS).
Written as a collective work by 14 outstanding microsystems packaging specialists from US industries, government laboratories and universities, MEMS Packaging provides a comprehensive view of the prevalent practices and enabling techniques in the assembly, packaging and testing of MEMS and microsystems. The book also addresses aspects of microassembly and testing technologies that are often overlooked.Aimed at professional engineers, scientists and technologists from industry, research laboratories and universities, the book examines every aspect of the assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in the key industries of life sciences, telecommunication and aerospace engineering. The authors cover key topics such as bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, RF telecommunications and aerospace applications.
Chapter 1technologiesChapter 3: Sealing technologiesChapter 4: Packaging of microsystemsChapter 5: Automated micro assemblyChapter 6: Testing and design for testChapter 7: MEMS packaging in the life sciencesChapter 8: RF and optical packaging telecommunications and other applicationsChapter 9: Aerospace applications