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Written as a "first exposure" to semiconductor microtechnology, this classic text places emphasis on the principles of the topic. The text presents an introduction to the development of microtechnology; is concerned with the growth and preparation of semiconducting materials; discusses the process of doping and type-conversion, and the twin technologies of diffusion and ion implantation; deals with oxidation, the process of photolithography, metallization, interconnections, and bonding; considers the structure and processing of circuit components and integrated circuits; and speculates on future trends in semiconductor microtechnology. Fully revised and updated, this second edition is presented in a more reader- friendly style, including instructional objectives and self- evaluation questions, plus problems at the ends of chapters. No particular mathematics skills or specialist knowledge is needed to be able to use this text effectively.
Table of Contents
The Development of Semiconductor Technology.
Materials for Semiconductor Devices.
Impurity Doping in Semiconductors.
Insulating Films on Semiconductors.
Metallization, Interconnections and Packaging.
Fabrication of Devices and Circuit Components.
MOS and Bipolar Technologies and Their
Future Developments in Semiconductor